**Short answer:** An O-ring request that says only "Kalrez O-ring, 25 mm" cannot be quoted. A supplier needs two separate things: the **size** (an AS568 dash number, an ISO 3601 / JIS size, or ID × cross-section with tolerances) and the **compound** (brand + grade, e.g. Kalrez 9300 or Chemraz 551). On top of that they need the **process** (chamber, temperature, gases or liquids), the **quantity** and whether the part is **copy-exact** or open to equivalents. Parker's O-Ring Handbook (ORD 5700) orders O-rings the same way: compound number followed by size number (its example: `N0674-70 2-325`).
1. Size: one standard, one number
| What you have | What to write | Example (from Parker ORD 5700, Section IX) |
|---|---|---|
| Inch-standard ring | AS568 dash number | AS568-214 (Parker 2-214): ID .984 ± .010 in, CS .139 ± .004 in (24.99 ± 0.25 mm × 3.53 ± 0.10 mm) |
| Metric ring | ISO 3601-1 (Series A or G) or JIS B2401 size code, **or** ID × CS in mm with tolerance | Parker lists ISO 3601-1 Series A/G and JIS B2401 tables separately from AS568 |
| Old ring, no drawing | Measured ID and CS, how measured, and a photo | Parker notes its sizing cone and Pi tape "cannot be used for pass/fail inspections" |
Tips:
- Don't convert an AS568 size to "nearest mm" or the reverse. 24.99 × 3.53 mm is an AS568 ring; a "25 × 3.5" metric ring is a different part.
- Say whether the size is the **free (uninstalled)** ring or the groove dimension. Parker's static vacuum gland chart (Design Chart 4-7), for example, designs the 1/8 in (.139) cross-section family (201–284) for 16–23 % squeeze. A groove dimension is not a ring size.
- Tool-OEM part numbers (chamber-kit item numbers) are useful but not enough on their own. Add the dash number or dimensions if you have them.
2. Compound: brand and grade, not "FFKM"
"FFKM" is a polymer family. Grades within it behave very differently. Parker's handbook (§2.2.10) describes FFKM generally as having the highest operating temperature range and widest chemical compatibility of the rubbers, and also lists what it is **not** compatible with (fluorinated refrigerants, perfluorinated PFPE lubricants). Grade-level data comes from the compound maker:
| Compound | Maker's suggested use (from the official guide/datasheet) | Typical hardness, Shore A | Max service / temp range stated |
|---|---|---|---|
| Kalrez 9300 | Dielectric (oxide) etch, 100–180 °C, CF4/C3F8/CHF3/SF6/O2/H2. Also conductor etch, ash/strip | 77 | 300 °C |
| Kalrez 9600 | PECVD/PEALD, 275–310 °C. Also SACVD/FCVD | 70 | 315 °C |
| Chemraz 551 | ALD, LPCVD, RTP, epi, thermal CVD, wet etch/clean, plating | 80 | −12 °C to 316 °C (text also says "stable at operating temperatures up to 300 °C") |
All three documents label these as typical values, **not for specification**. Don't write "hardness 77 ± 5" into a PO unless the maker's spec sheet gives that tolerance. The Kalrez selector table column headed "Maximum Service Temperature" actually lists *process* ranges. Use the grade's own property table for the material limit.
3. Process, temperature and chemistry
Give the supplier what the selector guides are indexed by:
- **Tool / chamber / seal location** (e.g. lid, slit valve, gas-feed, ESC, quartz window). The Kalrez guide recommends different grades by location in the same tool (e.g. 8705 for the quartz window and 9500 elsewhere in PECVD curing).
- **Process type** (oxide etch, PECVD, ALD, wet strip…).
- **Seal temperature**, both normal and peak. Not the wafer setpoint if you know they differ.
- **Chemistry**: plasma gases, precursors, cleaning chemistry (NF3 clean, O3, HF, H2SO4…).
- **Static or dynamic** and vacuum or pressure.
Parker's "Statement of Problem" form (Table 1-2) asks for the same things: fluid(s), high/low/working temperature, pressure, gland dimensions, leakage tolerance and "O-ring size no. and compound no."
4. Commercial fields procurement must fill in
1. Quantity, and whether a split delivery is acceptable.
2. Copy-exact (named grade only) or "equivalent may be quoted for evaluation".
3. Cleaning/packaging (ultraclean, double-bagged) and paperwork (CoC, lot/batch traceability).
4. Target date and ship-to country.
5. Whether the parts come from an OEM chamber kit (give the kit number) or are bought as loose rings.
Copy-paste RFQ template
Item: O-ring
Size: AS568-214 (ID 24.99 x CS 3.53 mm) [or ISO 3601 code / ID x CS + tol]
Compound: Kalrez 9300 | Equivalent allowed: YES / NO
Tool / location: <tool model>, oxide etch chamber, lid seal, static
Seal temp: normal __ °C / peak __ °C
Chemistry: CF4, CHF3, O2; NF3 clean
Qty: __ pcs Packaging: ultraclean, double-bagged Docs: CoC + lot no.
Need by: ____ Ship to: ____What not to do
- Don't send a compound name without a size, or a size without a compound.
- Don't treat a different brand as interchangeable on name alone. A Chemraz grade offered against a Kalrez grade is a **candidate to verify**, judged on the makers' own data for *your* process.
- Don't use typical-property numbers as acceptance criteria.
*Kalrez® is a trademark of DuPont de Nemours, Inc. or its affiliates. Chemraz® is a trademark of Greene Tweed. Parker is a trademark of Parker Hannifin Corp. Names are used for identification only. MST is not affiliated with or endorsed by these companies.*
Related: [Semiconductor O-ring RFQ checklist](/community/t/5-semiconductor-o-ring-rfq-checklist-dimensions-operating-cond)
Original OEM documents (links only)
1. Parker Hannifin, "Parker O-Ring Handbook", ORD 5700, © 2021 (§1.12.2 ordering; Table 1-2 Statement of Problem; §2.2.10 FFKM; Design Chart 4-7; Section IX sizes). https://www.parker.com/content/dam/Parker-com/Literature/O-Ring-Division-Literature/ORD-5700.pdf
2. DuPont, Kalrez® Semicon Product Selector Guide – Plasma Processes, Form No. KZE-A40111-00-A0422. https://www.pp.dupont.com/content/dam/electronics/amer/us/en/kalrez/public/documents/en/Semicon%20Product%20Selector%20Guide%20-%20Plasma%20-%20KZE-A40111-00-A0422.FinalRev.pdf
3. DuPont, Kalrez® Selector Guide – Thermal Processes, KZE-A40112-00-A0422. https://www.pp.dupont.com/content/dam/electronics/amer/us/en/kalrez/public/documents/en/Semicon%20Product%20Selector%20Guide%20-%20Thermal%20-%20KZE-A40112-00-A0422.FinalRev.pdf
4. DuPont, Kalrez® Selector Guide – Wet Processes, KZE-A40110-00-A0822. https://www.pp.dupont.com/content/dam/electronics/amer/us/en/kalrez/public/documents/en/Semicon-Product-Selector-Guide-Wet-Processes-KZE-A40110-00-A0822.pdf
5. Greene Tweed, Chemraz® 551 datasheet, 5/22-GT DS-US-SC-166. https://www.gtweed.com/wp-content/uploads/2020/10/chemraz-551-sc-ds.pdf
Request a quote
Have a size and grade, or only an old ring and a tool name? Post a [find-part request](/community/new?kind=part_request&mpn=Kalrez%209300) with the fields above, or send a [sourcing RFQ](/services/sourcing-rfq?sourcing_mode=supplier_match). MST replies in the thread or by email. MST does not claim stock of any item mentioned here; sourcing is done on request.
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