EBARA F-REX300 PVA brushes: PVP0EF3R1 vs PVP1EF3R1 and what to check

A tool name is a useful starting point, but it does not identify every detail of the replacement brush. This MST technical note explains two manufacturer-listed references and provides a checklist for identifying the installed part. 1. What the manufacturer lists Entegris associates both references with the EBARA F-REX300, 300 mm wafer platform: • PVP0EF3R1: NH4OH preservative. • PVP1EF3R1: H2O2 preservative. The Ebara-specific datasheet describes a PVA brush on a polypropylene core. Its brush outside diameter is 39 ± 1.0 mm. The drawing is labelled for these two part numbers; its dimensions should not be applied to every Planarcore brush. The 300 mm wafer-platform entry and the 39 mm brush diameter describe different objects. Also keep preservation chemistry separate from the cleaning recipe used on the machine: the ordering table alone does not specify that recipe. 2. Read the PDF with the right questions Original Entegris PDF, document 4424-5640ENT-0817 (2017): https://www.entegris.com/content/dam/product-assets/planarcorepvabrushes/datasheet-planarcore-pva-brush-for-ebara-5640.pdf Use page 2 for materials and the dimensional specification, then page 3 for the drawing and ordering references. This is an older document: obtain the current drawing and specification before approving a purchase or substitution. Manufacturer product table, checked 18 October 2026: https://www.entegris.com/shop/en/USD/products/wafer-handling/wafer-processing/cmp-cleaning-brushes/Planarcore-PVA-Brushes/p/PlanarcorePVABrushes 3. A practical identification record Record these fields before comparing a replacement: • Full tool model and configuration, plus the cleaning station or installed position. • Existing package label and complete part number, including any suffix. • Required preservative and the relevant process or purchasing specification. • Installed brush/core geometry, mounting details and the drawing revision used for comparison. • Required quantity and any lot documentation needed by your quality process. Write “unconfirmed” where information is missing. A photo can help locate a label or mounting feature; it does not establish chemical compatibility or process performance. 4. What this comparison establishes It identifies two references in the manufacturer's documentation. It does not demonstrate that they can be exchanged in a particular process, or that a third-party brush is interchangeable. No application test or stock check was performed for this note. For a technical discussion, share the non-confidential tool configuration and the specific field you cannot identify. For sourcing, the related Store page is: https://store.mst-sg.com/store/cmp-pva-brushes/SC-BRUSH-RFQ MST technical editorial | Version 1 | 18 October 2026