Equipment spares

200 mm legacy equipment spare parts replacement checklist (AMAT, Lam, TEL)

Many 200 mm fabs run Applied Materials, Lam Research and Tokyo Electron tools that are decades old. The OEMs still support much of this base: Lam runs a Reliant Systems business for 200 mm and older tools, TEL sells genuine and refurbished spares and certified used tools, and Applied Materials offers kit management and certified parts. Third-party refurbishers and compatible-part makers fill the remaining gaps.

This checklist covers which parts wear out, how to read and cross-reference OEM part numbers, how to choose between new, refurbished and compatible parts, and what to send in an RFQ. MST is a distributor and sourcing platform, not an OEM, and does not claim any tool maker as its brand.

Send an RFQ

Common consumables and spares on 200 mm tools

Lam describes two classes on its spares page: consumables, which are replaced on a schedule, and non-consumables, which it repairs or refurbishes and tests to new-part specifications. The same split works across AMAT, Lam and TEL tools.

Map of 200 mm tool spare part families grouped into process chamber, vacuum and gas, wafer handling, and electrical and RF — Part map drawn by MST Engineering; not an OEM parts list.

Typical part families by subsystem (grouping by MST Engineering)
Subsystem	Consumable (replace on PM)	Repairable / refurbishable
Process chamber (etch, CVD, PVD)	Edge and focus rings, liners, shields, process kits, lift pins, quartz and ceramic windows	Showerheads and gas distribution plates, heaters, electrostatic chucks
Vacuum and gas	O-rings and bonnet seals, gate and slit valve seals, filters	Dry pumps, turbo pumps, MFCs, valves, gauges
Wafer handling	Robot end-effector pads, rollers, belts, O-rings on cassettes	Robots, aligners, load ports
Electrical and RF	Fuses, lamps	RF generators, match networks, PCBs, power supplies, controllers
Track and wet (TEL CLEAN TRACK, wet stations)	Nozzles, filters, tubing, cup parts	Pumps, dispense units, hot plates

Cross-referencing OEM part numbers

Applied Materials part numbers are written as a four-digit prefix and a five-digit number, for example 0020-78554. Applied Materials supplier first-article training material separates 0010 assemblies, 0190 specification-controlled parts (including OEM-modified catalog items), 0240 kits and 0290 configurable assemblies. Public part lists also show 0020 on machined piece parts, 0100 on circuit boards and 0200 on ceramic and quartz parts. Treat these as patterns, not an official decode, and quote the full number with its revision.

Lam Research spares are usually written as NNN-NNNNNN-NNN (for example 810-017031-004 for a board in a public reseller listing). TEL numbers vary by product family. For any OEM, the safest cross-reference is the label on the removed part, the OEM parts catalog (MyLam for Lam, TELCustomer.com for TEL, Applied Materials customer portals) and the tool configuration.

Table graphic of Applied Materials part number prefixes 0010, 0020, 0100, 0190, 0200 and 0240 with example parts — Prefix chart by MST Engineering from public supplier training material and part lists.

Applied Materials prefixes as seen in public material (verify each part)
Prefix	Seen on	Example in public lists
0010-	Assemblies	0010-05670 roller assembly
0020-	Machined piece parts	0020-78554 ring, 8" wafer, oxide
0100-	Printed circuit board assemblies	0100-xxxxx boards
0190-	Specification-controlled parts, incl. OEM-modified catalog items	Supplier FAI material
0200-	Ceramic and quartz parts	0200-35596 slit window, Al₂O₃
0240-	Kits	0240-92272 kit

Examples are from a third-party list (Mattron) and Applied Materials supplier FAI training slides. A prefix alone does not prove interchangeability; revisions and chamber configuration matter.

New vs refurbished vs compatible parts

Comparison matrix of new OEM, OEM refurbished and third-party compatible semiconductor tool parts by risk, price and documents — Decision matrix by MST Engineering.

New OEM: current revision under OEM revision control (Lam calls these POR parts). Lowest process risk, highest price, and some 200 mm parts are last-time-buy or end of life.
OEM refurbished or certified: Lam repairs and refurbishes non-consumables and tests them to new specs; TEL offers refurbishment and localized repair; Applied Materials offers certified, cleaned PM parts through kit programs. Ask for the test report, warranty and revision.
Independent refurbished: repair shops rebuild RF generators, pumps, robots and boards. Ask what was replaced, how it was tested and on which tool model.
Third-party compatible (new-make): common for seals, fittings, quartz and simple machined parts. Ask for the drawing or data, material certificates and a first-article inspection, and run a qualification on one chamber before rolling out.
Re-engineered parts: Lam lists re-engineered parts for obsolete items. A redesign may change form or material, so treat it like a new part for qualification.

What to send in an RFQ

Checklist graphic listing eight items to include in a 200 mm semiconductor equipment spare parts RFQ — RFQ checklist by MST Engineering.

Tool OEM, model and platform, for example Applied Materials Centura or Producer, Lam Rainbow or Concept Two, TEL Unity or CLEAN TRACK ACT 8.
Chamber or module and process (etch, CVD, PVD, epi, track), and wafer size 200 mm.
Full OEM part number with revision, plus your fab-internal number if different.
Photos of the part and its label, and a drawing if you own one.
Condition you accept: new OEM, OEM refurbished, independent refurbished, compatible, or repair of your core.
Quantity, annual usage, target date, incoterm and ship-to country.
Material and purity requirements, for example FFKM grade for seals or Al₂O₃ purity for ceramics.
Documents required: certificate of conformance, test report, first-article inspection, warranty and export classification.

Spare-parts and refurbishment suppliers: list on MST

MST matches buyer RFQs for 200 mm spares with suppliers. If you refurbish RF generators, pumps, robots or boards, or make compatible seals, quartz, ceramics or machined parts for AMAT, Lam or TEL tools, apply through supplier admission and tell us your tool coverage, part families, test capability and documents. Listing does not imply any OEM endorsement.

Frequently asked questions

Do OEMs still support 200 mm tools?

Yes, in part. Lam Research runs Reliant Systems for 200 mm and older tools, TEL sells genuine and refurbished spares and certified used 200 mm tools, and Applied Materials offers kit management and certified parts. Coverage varies by model, so ask the OEM for the specific part.

What is the difference between AMAT 0010 and 0020 part numbers?

In Applied Materials supplier material and public part lists, 0010 is used for assemblies and 0020 for machined piece parts. It is a pattern, not an official decode; always quote the full number and revision.

Is a refurbished part as good as new?

It depends on who refurbished it and how it was tested. Lam states that its repaired and refurbished non-consumables are tested to new-part specifications. For independent refurbishers, ask for the test report and warranty.

When is a compatible part acceptable?

Mostly for consumables with a clear specification, such as seals, fittings and simple machined, quartz or ceramic parts. Qualify it on one chamber first and keep material certificates and first-article data.

What should my RFQ include?

Tool OEM and model, chamber and process, the full OEM part number with revision, photos, accepted condition, quantity and date, material requirements and required documents.

Can I list my spare-parts business on MST?

Yes. Apply through supplier admission with your tool coverage, part families, test capability and documents. MST is a distributor and sourcing platform, not an OEM.

Send a 200 mm spares RFQ

Send the tool model, chamber, OEM part number with revision, photos, accepted condition and quantity. MST matches new, refurbished and compatible sources and replies with options.