Short answer: For a 200 mm Applied Materials, Lam Research or TEL tool, separate scheduled consumables (rings, liners, seals, pins, windows) from repairable spares (RF, pumps, robots, boards), quote the full OEM part number with revision, decide between new OEM, OEM refurbished, independent refurbished and compatible parts by process risk, and send tool model, chamber, photos and required documents in the RFQ. The full checklist is at [200 mm legacy equipment spare parts checklist](/buying-guides/200mm-legacy-equipment-spare-parts-checklist).
MST is a distributor and sourcing platform, not an OEM. OEM support facts below come from the Lam Research, TEL and Applied Materials pages listed at the end.
Step 1: Know what wears out
Part map drawn by MST Engineering; not an OEM parts list.
- Process chamber: edge and focus rings, liners, shields, process kits, lift pins, quartz and ceramic windows; showerheads, heaters and chucks are often refurbished.
- Vacuum and gas: O-rings, bonnet and slit valve seals; pumps, MFCs, valves and gauges are rebuilt.
- Wafer handling: end-effector pads, rollers, belts; robots and aligners are repaired.
- Electrical and RF: RF generators, matches, boards and supplies are repaired or exchanged.
Lam's spares page states that its repaired and refurbished non-consumables are tested to new-part specs, and lists re-engineered parts and last-time buys for obsolete items. Lam Reliant Systems supports 200 mm tools such as Concept Two; TEL sells genuine and refurbished spares and certified used 200 mm tools; Applied Materials offers Total Kit Management with certified, cleaned PM parts.
Step 2: Cross-reference the part number
Prefix chart drawn by MST Engineering from public supplier training material and part lists.
| AMAT prefix | Seen on | Public example |
|---|---|---|
| 0010- | Assemblies | 0010-05670 roller assembly |
| 0020- | Machined piece parts | 0020-78554 ring, 8" wafer, oxide |
| 0100- | Circuit boards | 0100-xxxxx |
| 0190- | Specification-controlled parts | supplier FAI material |
| 0200- | Ceramic and quartz parts | 0200-35596 slit window, Al₂O₃ |
| 0240- | Kits | 0240-92272 |
These are patterns, not an official Applied Materials decode. Lam numbers usually read NNN-NNNNNN-NNN. Always copy the label of the removed part and check the OEM catalog (MyLam, TELCustomer.com or the Applied Materials portal).
Step 3: New, refurbished or compatible
Decision matrix drawn by MST Engineering.
New OEM parts carry the lowest risk and the highest price. OEM refurbished parts suit RF, robots and boards; ask for the test report and revision. Compatible parts suit seals, fittings and simple quartz, ceramic or machined parts once a first article passes on one chamber.
Step 4: Send a complete RFQ
RFQ checklist drawn by MST Engineering.
Include tool OEM and model, chamber and process, full part number with revision, photos, accepted condition, quantity and date, material requirements and the documents you need.
Suppliers: list on MST
If you refurbish or make compatible parts for AMAT, Lam or TEL 200 mm tools, apply through [supplier admission](/supplier-admission) with your tool coverage, part families and test capability. Listing implies no OEM endorsement.
Original OEM documents (links only)
1. Lam Research, Reliant Systems. https://www.lamresearch.com/customer-support/reliant-systems/
2. Lam Research, Spares. https://www.lamresearch.com/customer-support/spares/
3. Tokyo Electron, Spare parts and repairs. https://www.tel.com/product/service/spareparts-repairs/index.html
4. Tokyo Electron, Used products. https://www.tel.com/product/service/used-products/index.html
5. Applied Materials, Supply chain solutions. https://www.appliedmaterials.com/us/en/supply-chain-solutions.html
Send an RFQ
Send your list through a [sourcing RFQ](/services/sourcing-rfq?sourcing_mode=supplier_match) or [request a quote](/rfq?entry_source=community&search_term=200mm+spare+parts&quantity=1&community_path=%2Fcommunity%2Fc%2Fequipment). For one hard-to-find part, [post a part request](/community/new?kind=part_request). Related: [FFKM O-rings](/store/as568-o-rings/AS568-214-FFKM-RFQ), [vacuum fittings](/store/vacuum-fittings/SC-VACUUM-RFQ).