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0240-92272: 1 discussion. 200 mm legacy equipment spare parts replacement checklist: AMAT, Lam and TEL consumables, part numbers and RFQs
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200 mm legacy equipment spare parts replacement checklist: AMAT, Lam and TEL consumables, part numbers and RFQs
**Short answer:** For a 200 mm Applied Materials, Lam Research or TEL tool, separate scheduled consumables (rings, liners, seals, pins, windows) from repairable spares (RF, pumps, robots, boards), quote the full OEM part number with revisio