E595 discussions
E595: 1 discussion. Selecting FFKM AS568 O-rings for semiconductor tools: FFKM vs FKM vs EPDM, grade by process and RFQ checklist
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Selecting FFKM AS568 O-rings for semiconductor tools: FFKM vs FKM vs EPDM, grade by process and RFQ checklist
**Short answer:** Use FFKM where a seal sees fluorine or oxygen plasma, temperatures above the roughly 204 °C limit of FKM, or chemicals that FKM does not tolerate, such as amines and ammonia. Choose the FFKM grade by process step, not just