AS568-330 discussions
AS568-330: 2 discussions. O-ring failure modes in semiconductor tools: read the failed seal, then choose the elastomer by chemistry and temperature
Can't find a part, or don't want to search? Tell MST
Describe what you need. MST checks sources and substitutes for you, and the thread stays useful to other engineers.
Prefer a direct quote? Send MST a sourcing RFQ for this part.
Catalog products
O-ring failure modes in semiconductor tools: read the failed seal, then choose the elastomer by chemistry and temperature
**Short answer:** Before you reorder a failed O-ring, look at it in cross section. A ring with flat sides and no rebound has taken a compression set. Material squeezed into the clearance gap means extrusion. An oversized, soft ring has swel
Selecting FFKM AS568 O-rings for semiconductor tools: FFKM vs FKM vs EPDM, grade by process and RFQ checklist
**Short answer:** Use FFKM where a seal sees fluorine or oxygen plasma, temperatures above the roughly 204 °C limit of FKM, or chemicals that FKM does not tolerate, such as amines and ammonia. Choose the FFKM grade by process step, not just