AS568-330 讨论
AS568-330: 2 篇讨论. O-ring failure modes in semiconductor tools: read the failed seal, then choose the elastomer by chemistry and temperature; Selecting FFKM
找不到料，或不想自己搜？告诉 MST
描述你的需求，MST 帮你核查货源和替代型号；这个帖子也能帮到其他工程师。
想直接要报价？向 MST 提交该料号的找料询价。
目录产品
O-ring failure modes in semiconductor tools: read the failed seal, then choose the elastomer by chemistry and temperature
**Short answer:** Before you reorder a failed O-ring, look at it in cross section. A ring with flat sides and no rebound has taken a compression set. Material squeezed into the clearance gap means extrusion. An oversized, soft ring has swel
Selecting FFKM AS568 O-rings for semiconductor tools: FFKM vs FKM vs EPDM, grade by process and RFQ checklist
**Short answer:** Use FFKM where a seal sees fluorine or oxygen plasma, temperatures above the roughly 204 °C limit of FKM, or chemicals that FKM does not tolerate, such as amines and ammonia. Choose the FFKM grade by process step, not just